Resolution:

 0,1/0,05/0,02/0,01µm (A/B quadrature)   or    0,4µm (1Vp-p)

 Measuring lenght:

 30mm - 1060mm

 Accuracy:

 +/-0,5; +/-1,0; +/-1,5µm (dependent on the measuring length)

 Output signal:

 A/B quadrature or analogue

 Signal pitch:

 400nm